An ideal shunt switch provides a short circuit to ground when a voltage bias. Presents rf switches and switching circuit mems devices in a unified. From this experiment we have seen that we can combine the baking. Mems reference shelf mems reference shelf editorinchief stephen d. Rf mems switches for reconfigurable integrated circuits. The proposed threeterminal switch consists of a cntintegrated source electrode.
Rf circuits for aesa using rf mems switches examples phase shifter. Milosavljevic abstract an overview of the mems technology development and applications is given in this paper. Both series and shunt mems switches have been considered. Functional diagrams of two common rf mems switch structures.
Tang abstract radio frequency rf microelectromechanical systems mems have been pursued for more than a decade as a solution of highperformance onchip fixed, tunable and reconfigurable circuits. Rf mems switches and integrated switching circuits a. Rf mems switches are already shipping to or poised. Mems magnetic motors operate using magnet attraction and repulsion just like bigger motors. It also presents rf mems capacitive switches, first ever to be produced in. Txrx selection, reconfiguration of filters, of phase shifters or of antennas. With a twophase stepper motor and the circuit in figure 6, we can drive the stepper with the appropriate power levels. Mems switches promise to combine the advantageous properties of both mechanical and. Rf mems switches and integrated switching circuits aiqun liu. The resulting relays arent particularly speedy compared to todays transistors. Rf mems switches and integrated switching circuits builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on rf mems switches and micromachined switching circuits, and presents a unified framework of coverage.
The microelectromechanical systems mems is the integration of. By sarjak shah and sakina fakhruddin 2010aaa4091h 2010a3ps220h. A relay thats about the size of a modern cmos device can take anywhere from 1 to 10 nanoseconds to. Rfmems switches for reconfigurable integrated circuits. External wire coils can motivate the mems, or coils can be integrated into the mems structure. Rf mems switches and integrated switching circuits article in journal of semiconductor technology and science 73 september 2007 with 759 reads how we measure reads. A low loss rf mems kuband integrated switched filter bank, ieee microwave and. Ieee transactions on microwave theory and techniques, vol. Capacitive switches have been presented by numerous authors 1, 2, and 3 and show excellent life time. It is also presented a technique for modeling and design of inductivelytuned mems shunt switch. A special attention is paid to the rf mems switches. Pdf rfmems switches for reconfigurable integrated circuits. International journal of microwave and wireless technologies, 2011.
Abstract radio frequency rf microelectromechanical. Rf mems provides a class of new devices and components which display superior highfrequency. Rf mems switches and integrated switching circuits ebook. An overview of rf mems switches free download as powerpoint presentation. Integrated reconfigurable radio frontend technology irrft. Switches are deemed to be key components among the rf mems, and are used for manifold applications e.
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